Comment by yannyu
> I assume they don't pattern the unused area, so the process should be quicker?
The primary driver of time and cost in the fabrication process is the number of layers for the wafers, not the surface area, since all wafers going through a given process are the same size. So you generally want to maximize the number of devices per wafer, because a large part of your costs will be calculated at the per-wafer level, not a per-device level.
Yes, but isn't a big driver of layer costs the cost of the machines to build those layers?
For patterning, a single iteration could be (example values, no actual values used, probably only ballpark accuracy) on a 300M$ EUV machine with 5-year write off cycle, patterns on average 180 full wafers /hour. Excluding energy usage and service time, each wafer that needs full patterning would cost ~38$. If each wafer only needed half the area patterned, the lithography machine might only spend half its usual time on such a wafer, and that could double the throughput of the EUV machine, halving the write-off based cost component of such a patterning step.
Given that each layer generally consists of multiple patterning steps, a 10-20% reduction in those steps could give a meaningful reduction in time spent in the machines whose time spend on the wafer depends on the used wafer area.
This of course doesn't help reduce time in polishing or etching (and other steps that happen with whole wafers at a time), so it won't be as straightforward as % reduction in wafer area usage == % reduction in cost, but I wouldn't be surprised if it was a meaningful percentage.