Comment by 0x457
> Depends what you mean by "adopted". Pretty sure Intel had EUV prototypes before TSMC (or at least very close), but it was slower to transition its high volume production to it due to execution issues.
EUV by ASML was not possible until there was a technology to create focusing lenses for it. Intel decided not to "wait" and use their existing technology to beat everyone.
Wasn't the limitation more about light sources? And don't EUV machines use mirrors rather than lenses?